| Resolution | 0.9 Nm – 30kV (SE) | 1 Nm – 15 kV (SE) | 1.8 Nm – 1 kV (SE) |
| Increase | 12x – 1,000,000x |
| Cathode type | Schottky cathode |
| accelerating voltage | 200 V – 30 kV |
| Detectors | SE, LVD, semiconductor four-section BSE |
| Platen | With five degrees of freedom |
| Table movement range | X,Y: 110mm | Z: 65 mm | R: 360° | T: -10° – 70° |
| Additional options | EDS, EBSD, CL, STEM, Gateway, table with heating and cooling, table for physical and mechanical testing, etc. |
