| Resolution | 3 Nm – 30 kV (SE) | 7 Nm – 3 kV (SE) | 4 Nm – 30 kV (BSE) |
| Increase | 12x – 300000x |
| Cathode type | Thermal emission tungsten cathode |
| accelerating voltage | 200 V – 30 kV |
| Vacuum system | Turbomolecular pump, rotary pump |
| Detectors | SE, semiconductor four-section BSE |
| Platen | with 3 degrees of freedom |
| Table movement range | X,Y: 125mm | Z: 50 mm |
| maximum sample diameter | 270 mm |
| Additional options | EDS, CL, EBL, gateway, table with heating and cooling, table for physical and mechanical testing, etc. |