Modern Design of Electronic Column;
Improved performance at low accelerating voltages. Resolution of 7 nm at 3 kv;
simplified procedure for replacing the cathode and a built-in software wizard for adjusting the electron column;
Optical Navigation Camera as Standard;
Safe Table Movement System, built-in collision system;
astigmatism compensation mode using artificial intelligence. Unique Mode for Assisted Stigmator Adjustment;
Low Vacuum Mode (Optional). for working with non-conductive samples without additional sample preparation;
Many additional options to expand the capability.
| Permission | 3 nm – 30 kV (SE) | 7 nm – 3 kV (SE) | 4 nm – 30 kV (BSE) |
| Increase | 12x – 300000x |
| cathode type | Thermionic Tungsten Cathode |
| Accelerating Voltage | 200V – 30KV |
| Vacuum System | Turbomolecular Pump, Rotary Pump |
| detectors | SE, Semiconductor four-section BSE |
| table | 3 Degrees of Freedom |
| Table Travel Range | X,Y: 125 mm | Z: 50 mm |
| Maximum sample diameter | 270 mm |
| Additional options | EDS, CL, EBL, Airlock, Heating and Cooling Stage, Physical and Mechanical Testing Stage, etc. |
